課程資訊
課程名稱
薄膜技術與表面分析
Thin-film Technology and Surface 
開課學期
112-1 
授課對象
工學院  化學工程學研究所  
授課教師
陳賢燁 
課號
ChemE5030 
課程識別碼
524 U1800 
班次
 
學分
3.0 
全/半年
半年 
必/選修
選修 
上課時間
星期四6,7,8(13:20~16:20) 
上課地點
綜403 
備註
化工選修課程。與闕居振合授
總人數上限:70人 
 
課程簡介影片
 
核心能力關聯
核心能力與課程規劃關聯圖
課程大綱
為確保您我的權利,請尊重智慧財產權及不得非法影印
課程概述

Introduction to various fundamental techniques in analyzing thin-film materials. Lectures on different analytical theories. Students are provided with opportunities to operate experimental instruments and apparatuses. 

課程目標
 
課程要求
Course Outline Instruction Hours remark
Topics Contents lecture demonstration experiment others1
Introduction 1. Thin-film technology and surface analysis 3
1.
X-ray diffraction and analysis of crystal phases on thin films
1. Thin-film deposition by the sol-gel method
2. Semiconductor chemical sensors
3. X-ray diffractive analysis 3 3
Synthesis and properties of electrochromic thin films 1. Spectro-electrochemical properties of electrochromic thin films
2. Fabrication and application of electrochromic devices
3. Performance evaluation on electrochromic devices 3 3
Atomic force microscope (AFM)
1. Tunneling effects
2. Application of tunneling effects
3. Atomic force microscope (AFM)
4. Lateral force microscope (LFM)
5. Phase imaging 3 3
Surface analysis by using XPS and Auger 1. Introduction to Surface analysis
2. XRF theory and
spectra
3. Auger theory and
spectra 3 3
Scanning electron microscopy (SEM) 1. Varieties and functions of electron microscopes
2. Comparisons between electron and optical microscopes
3. Machinery structure of electron microscopes
4. Points for attention for operating electron microscopes 3 3 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
無資料